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日本 JIMA 日本检查机器工业会 ET TM-02 X射线管焦点尺寸测试卡

2026-02-05 17:07:02 admin

图片关键词

核心技术规格

结构与尺寸

基板：铝基座
芯片：硅（Si）基片
吸收体：金（Au），高对比度结构

测试图案

采用星形 / 扇形测试图案（Star Pattern） + 多组线对
可测焦点尺寸范围：3–10 μm
图案精度：±10% 级（焦点测量标准公差）

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日本 JIMA 日本检查机器工业会 ET TM-02 X射线管焦点尺寸测试卡

核心技术规格

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